Singh Center for Nanotechnology Rate List

NCF

Cressington Sputter Coater ▶
External Academic: 10.00/hr (Singh Center Off-Peak Hours)
11.00/hr (5.00 minimum)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 11.00/hr (5.00 minimum)
10.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr (Singh Center Off-Peak Hours)
11.00/hr (5.00 minimum)
JEOL 7500F HRSEM ▶
External Academic: 34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
External Corporate: 231.00/hr (5.00 minimum)
197.00/hr (Singh Center Off-Peak Hours)
External Government: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
Internal: 34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
JEOL F200 TEM-STEM ▶
External Academic: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
External Corporate: 281.00/hr (Singh Center Off-Peak Hours)
330.00/hr (5.00 minimum)
External Government: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
Internal: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
JEOL NeoARM TEM-STEM ▶
External Academic: 77.00/hr (5.00 minimum)
66.00/hr (Singh Center Off-Peak Hours)
External Corporate: 462.00/hr (5.00 minimum)
393.00/hr (Singh Center Off-Peak Hours)
External Government: 66.00/hr (Singh Center Off-Peak Hours)
77.00/hr (5.00 minimum)
Internal: 77.00/hr (5.00 minimum)
66.00/hr (Singh Center Off-Peak Hours)
ProSEM Software ▶
External Academic: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
External Corporate: 0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
External Government: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
Internal: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
Tescan S8000X Plasma FIB ▶
External Academic: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
External Corporate: 281.00/hr (Singh Center Off-Peak Hours)
330.00/hr (5.00 minimum)
External Government: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
Internal: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
TFS Quanta 600 ESEM ▶
External Academic: 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
External Corporate: 264.00/hr (5.00 minimum)
225.00/hr (Singh Center Off-Peak Hours)
External Government: 38.00/hr (Singh Center Off-Peak Hours)
44.00/hr (5.00 minimum)
Internal: 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
Zeiss Orion Nanofab HIM ▶
External Academic: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
External Corporate: 330.00/hr (5.00 minimum)
281.00/hr (Singh Center Off-Peak Hours)
External Government: 47.00/hr (Singh Center Off-Peak Hours)
55.00/hr (5.00 minimum)
Internal: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
Tool usage rates External AcademicExternal CorporateExternal GovernmentInternal
Cressington Sputter Coater 10.00/hr (Singh Center Off-Peak Hours)
11.00/hr (5.00 minimum)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
11.00/hr (5.00 minimum)
10.00/hr (Singh Center Off-Peak Hours)
10.00/hr (Singh Center Off-Peak Hours)
11.00/hr (5.00 minimum)
JEOL 7500F HRSEM 34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
231.00/hr (5.00 minimum)
197.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
JEOL F200 TEM-STEM 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
281.00/hr (Singh Center Off-Peak Hours)
330.00/hr (5.00 minimum)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
JEOL NeoARM TEM-STEM 77.00/hr (5.00 minimum)
66.00/hr (Singh Center Off-Peak Hours)
462.00/hr (5.00 minimum)
393.00/hr (Singh Center Off-Peak Hours)
66.00/hr (Singh Center Off-Peak Hours)
77.00/hr (5.00 minimum)
77.00/hr (5.00 minimum)
66.00/hr (Singh Center Off-Peak Hours)
ProSEM Software 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
Tescan S8000X Plasma FIB 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
281.00/hr (Singh Center Off-Peak Hours)
330.00/hr (5.00 minimum)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
TFS Quanta 600 ESEM 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
264.00/hr (5.00 minimum)
225.00/hr (Singh Center Off-Peak Hours)
38.00/hr (Singh Center Off-Peak Hours)
44.00/hr (5.00 minimum)
44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
Zeiss Orion Nanofab HIM 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
330.00/hr (5.00 minimum)
281.00/hr (Singh Center Off-Peak Hours)
47.00/hr (Singh Center Off-Peak Hours)
55.00/hr (5.00 minimum)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)

QNF

ALD-01 (Cambridge S200) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
ALD-03 (Veeco Savannah 200) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-01 (Wafer Bonder) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-02 (Wafer Bond Aligner) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-03 (K&S Wire Bonder) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-04 (ADT Dicing Saw) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-06 (TPT Wire Bonder) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
BE-07 (Tresky Bonder) ▶
External Academic: 30.00/hr (Singh Center Off-Peak Hours)
35.00/hr (5.00 minimum)
External Corporate: 105.00/hr (5.00 minimum)
90.00/hr (Singh Center Off-Peak Hours)
External Government: 35.00/hr (5.00 minimum)
30.00/hr (Singh Center Off-Peak Hours)
Internal: 35.00/hr (5.00 minimum)
30.00/hr (Singh Center Off-Peak Hours)
CPD-01 (Critical Point Dryer) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
CVD-01 (Oxford PlasmaLab 100) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02A (Oxide) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02B (Nitride) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02C (Anneal 1) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02D (Anneal 2) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-04 (SMI MOCVD) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-01 (IntlVac IBE) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-02 (SCE-108 Asher) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-03 (SPTS Si DRIE) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
DE-04 (Oxford 80 Plus RIE) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-05 (Oxford Cobra ICP) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-06 (XeF2 Isotropic Etcher) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-07 (Anatech Barrel Asher) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-08 (March Jupiter II) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-09 (PIE Tergeo+ Asher) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-10 (RIE) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
EBL-02 (Litho Workstation) ▶
External Academic: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
External Corporate: 141.00/hr (Singh Center Off-Peak Hours)
165.00/hr (5.00 minimum)
External Government: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
Internal: 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
EBL-03 (Raith EBPG5200+) ▶
External Academic: 165.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
External Corporate: 495.00/hr (5.00 minimum)
421.00/hr (Singh Center Off-Peak Hours)
External Government: 141.00/hr (Singh Center Off-Peak Hours)
165.00/hr (5.00 minimum)
Internal: 165.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
LMM-01 (193nm Excimer Laser) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LMM-02 (532nm Green Laser) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
LW-01 (Heidelberg DWL66+) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LW-02 (Nanoscribe) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LW-03 (DMO ML3 Pro) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
MA-01 (MA6 Mask Aligner) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MA-02 (Nanonex) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MA-03 (ABM Mask Aligner) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MET-01 (2D profilometer) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
External Government: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-02 (3D+stress profilometer) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-03 (F50 - Yellow Light) ▶
External Academic: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
External Corporate: 50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-04 (F40) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-05 (Profilm3D) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-06 (Ellipsometer) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
External Government: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-07 (Keyence VHX) ▶
External Academic: 50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
External Corporate: 300.00/hr (5.00 minimum)
255.00/hr (Singh Center Off-Peak Hours)
External Government: 50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
Internal: 50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
MET-08 (Four Point Probe) ▶
External Academic: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
External Corporate: 50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-09 (Probe Station) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
External Government: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-11 (F50 - White Light) ▶
External Academic: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
External Corporate: 50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
External Government: 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
Internal: 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-12 (Zeiss Microscope) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
MET-13 (Zeiss Microscope) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
MET-14 (Zeiss Microscope) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
MET-15 (Zeiss Microscope) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
OVN-01 (Genesis HMDS Prime Oven) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-01 (Nano-36 thermal) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-02 (PVD75 e-beam & therm) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-03 (PVD75 sputterer) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-04 (PVD75 e-beam) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-05 (Explorer14 Sputterer) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-06 (Evatec Sputterer) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-07 (Parylene Coater) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-08 (Silanization Dessicator) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
PVD-09 (Intlvac Evap) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
RC-01 (SUSS Spray Coater) ▶
External Academic: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
RTA-01 (Si Anneal) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
External Government: 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
RTA-02 (General Anneal) ▶
External Academic: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
External Corporate: 71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
External Government: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
Internal: 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
SPN-01 (CEE Apogee - Acetone Soluble) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-03 (CEE Apogee - LOR, PMGI) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-06 (CEE Apogee - Ebeam) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-07 (Brewer 200X - White Light) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
SPN-08 (CEE Apogee - Soft Litho) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-09 (CEE Apogee - PDMS) ▶
External Academic: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
External Government: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SRD-01 (Spin Rinse Dryer) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-03 (Negative Photoresist Dev) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-04 (Negative Photoresist Coat) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-05 (E-beam Resist Coat & Dev) ▶
External Academic: 0.00/hr
External Corporate: 0.00/hr
External Government: 0.00/hr
Internal: 0.00/hr
WB-06 (Hydrofluoric Acid) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-08 (Base Chemistry Process) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-09 (Sonicator - Bay 3) ▶
External Academic: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
External Corporate: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
External Government: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
Internal: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
WB-10 (Acid Chemistry Process) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-11 (Sonicator - Bay 2) ▶
External Academic: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
External Corporate: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
External Government: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
Internal: 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
WB-12 (Packaging) ▶
External Academic: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-13 ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-14 (RCA Clean) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-16 (Negative Resist Process) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
External Government: 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-17 (PDMS Process) ▶
External Academic: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
External Corporate: 26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
External Government: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Internal: 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
Tool usage rates External AcademicExternal CorporateExternal GovernmentInternal
ALD-01 (Cambridge S200) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
ALD-03 (Veeco Savannah 200) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-01 (Wafer Bonder) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-02 (Wafer Bond Aligner) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-03 (K&S Wire Bonder) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-04 (ADT Dicing Saw) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
BE-06 (TPT Wire Bonder) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
BE-07 (Tresky Bonder) 30.00/hr (Singh Center Off-Peak Hours)
35.00/hr (5.00 minimum)
105.00/hr (5.00 minimum)
90.00/hr (Singh Center Off-Peak Hours)
35.00/hr (5.00 minimum)
30.00/hr (Singh Center Off-Peak Hours)
35.00/hr (5.00 minimum)
30.00/hr (Singh Center Off-Peak Hours)
CPD-01 (Critical Point Dryer) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
CVD-01 (Oxford PlasmaLab 100) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02A (Oxide) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02B (Nitride) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02C (Anneal 1) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-02D (Anneal 2) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
CVD-04 (SMI MOCVD) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-01 (IntlVac IBE) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-02 (SCE-108 Asher) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-03 (SPTS Si DRIE) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
DE-04 (Oxford 80 Plus RIE) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-05 (Oxford Cobra ICP) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-06 (XeF2 Isotropic Etcher) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-07 (Anatech Barrel Asher) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-08 (March Jupiter II) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-09 (PIE Tergeo+ Asher) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
DE-10 (RIE) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
EBL-02 (Litho Workstation) 55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
141.00/hr (Singh Center Off-Peak Hours)
165.00/hr (5.00 minimum)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
55.00/hr (5.00 minimum)
47.00/hr (Singh Center Off-Peak Hours)
EBL-03 (Raith EBPG5200+) 165.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
495.00/hr (5.00 minimum)
421.00/hr (Singh Center Off-Peak Hours)
141.00/hr (Singh Center Off-Peak Hours)
165.00/hr (5.00 minimum)
165.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
LMM-01 (193nm Excimer Laser) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LMM-02 (532nm Green Laser) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
LW-01 (Heidelberg DWL66+) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LW-02 (Nanoscribe) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
LW-03 (DMO ML3 Pro) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
MA-01 (MA6 Mask Aligner) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MA-02 (Nanonex) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MA-03 (ABM Mask Aligner) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
MET-01 (2D profilometer) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-02 (3D+stress profilometer) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-03 (F50 - Yellow Light) 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-04 (F40) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-05 (Profilm3D) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-06 (Ellipsometer) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-07 (Keyence VHX) 50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
300.00/hr (5.00 minimum)
255.00/hr (Singh Center Off-Peak Hours)
50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
50.00/hr (5.00 minimum)
42.00/hr (Singh Center Off-Peak Hours)
MET-08 (Four Point Probe) 15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
MET-09 (Probe Station) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
43.00/hr (Singh Center Off-Peak Hours)
50.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-11 (F50 - White Light) 17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
50.00/hr
43.00/hr (Singh Center Off-Peak Hours)
15.00/hr (Singh Center Off-Peak Hours)
17.00/hr
17.00/hr
15.00/hr (Singh Center Off-Peak Hours)
MET-12 (Zeiss Microscope) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
MET-13 (Zeiss Microscope) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
MET-14 (Zeiss Microscope) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
MET-15 (Zeiss Microscope) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
OVN-01 (Genesis HMDS Prime Oven) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-01 (Nano-36 thermal) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-02 (PVD75 e-beam & therm) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-03 (PVD75 sputterer) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-04 (PVD75 e-beam) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-05 (Explorer14 Sputterer) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-06 (Evatec Sputterer) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
PVD-07 (Parylene Coater) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
PVD-08 (Silanization Dessicator) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
PVD-09 (Intlvac Evap) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
RC-01 (SUSS Spray Coater) 24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
RTA-01 (Si Anneal) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
71.00/hr (Singh Center Off-Peak Hours)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
RTA-02 (General Anneal) 28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
71.00/hr (Singh Center Off-Peak Hours)
83.00/hr (5.00 minimum)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
28.00/hr (5.00 minimum)
24.00/hr (Singh Center Off-Peak Hours)
SPN-01 (CEE Apogee - Acetone Soluble) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-03 (CEE Apogee - LOR, PMGI) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-06 (CEE Apogee - Ebeam) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-07 (Brewer 200X - White Light) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
SPN-08 (CEE Apogee - Soft Litho) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SPN-09 (CEE Apogee - PDMS) 10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr
9.00/hr (Singh Center Off-Peak Hours)
SRD-01 (Spin Rinse Dryer) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-03 (Negative Photoresist Dev) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-04 (Negative Photoresist Coat) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-05 (E-beam Resist Coat & Dev) 0.00/hr
0.00/hr
0.00/hr
0.00/hr
WB-06 (Hydrofluoric Acid) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-08 (Base Chemistry Process) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-09 (Sonicator - Bay 3) 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
WB-10 (Acid Chemistry Process) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-11 (Sonicator - Bay 2) 0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
0.00/hr
0.00/hr (Singh Center Off-Peak Hours)
WB-12 (Packaging) 9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
WB-13 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-14 (RCA Clean) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-16 (Negative Resist Process) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
26.00/hr (Singh Center Off-Peak Hours)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
WB-17 (PDMS Process) 10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
26.00/hr (Singh Center Off-Peak Hours)
30.00/hr (5.00 minimum)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)
10.00/hr (5.00 minimum)
9.00/hr (Singh Center Off-Peak Hours)

SLPF

AFM - Asylum ▶
External Academic: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
External Corporate: 600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
External Government: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
Internal: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
AFM - Bruker Icon ▶
External Academic: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
External Corporate: 600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
External Government: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
Internal: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
AFM - TIRF ▶
External Academic: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
External Corporate: 600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
External Government: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
Internal: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
AFM - Vero ▶
External Academic: 40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
External Corporate: 600.00/hr
510.00/hr (Singh Center Off-Peak Hours)
External Government: 40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
Internal: 40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
Keyence Profilometer ▶
External Academic: 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
External Corporate: 510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
External Government: 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
Internal: 38.00/hr (Singh Center Off-Peak Hours)
44.00/hr (5.00 minimum)
Probe Station ▶
External Academic: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
External Corporate: 600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
External Government: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
Internal: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
Raman - Horiba ▶
External Academic: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
External Corporate: 510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
External Government: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
Internal: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
Raman - NT-MDT (NSOM) ▶
External Academic: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
External Corporate: 600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
External Government: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
Internal: 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
UHV AFM-STM ▶
External Academic: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
External Corporate: 600.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
External Government: 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
Internal: 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
Tool usage rates External AcademicExternal CorporateExternal GovernmentInternal
AFM - Asylum 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
AFM - Bruker Icon 29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
AFM - TIRF 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
AFM - Vero 40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
600.00/hr
510.00/hr (Singh Center Off-Peak Hours)
40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
40.00/hr
35.00/hr (Singh Center Off-Peak Hours)
Keyence Profilometer 44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
44.00/hr (5.00 minimum)
38.00/hr (Singh Center Off-Peak Hours)
38.00/hr (Singh Center Off-Peak Hours)
44.00/hr (5.00 minimum)
Probe Station 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
Raman - Horiba 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
510.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
Raman - NT-MDT (NSOM) 39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
510.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
39.00/hr (5.00 minimum)
34.00/hr (Singh Center Off-Peak Hours)
UHV AFM-STM 33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)
600.00/hr (5.00 minimum)
141.00/hr (Singh Center Off-Peak Hours)
29.00/hr (Singh Center Off-Peak Hours)
33.00/hr (5.00 minimum)
33.00/hr (5.00 minimum)
29.00/hr (Singh Center Off-Peak Hours)

VLEST

IR-VASE ellipsometer ▶
External Academic: 8.00/hr
External Corporate: 12.00/hr
External Government: 8.00/hr
Internal: 4.00/hr
TA DSC X3 ▶
External Academic: 23.00/hr
External Corporate: 45.00/hr
External Government: 23.00/hr
Internal: 15.00/hr
TA HR-30 Rheometer ▶
External Academic: 23.00/hr
External Corporate: 45.00/hr
External Government: 23.00/hr
Internal: 15.00/hr
TA TGA5500-MS ▶
External Academic: 23.00/hr
External Corporate: 45.00/hr
External Government: 23.00/hr
Internal: 15.00/hr
Tool usage rates External AcademicExternal CorporateExternal GovernmentInternal
IR-VASE ellipsometer 8.00/hr
12.00/hr
8.00/hr
4.00/hr
TA DSC X3 23.00/hr
45.00/hr
23.00/hr
15.00/hr
TA HR-30 Rheometer 23.00/hr
45.00/hr
23.00/hr
15.00/hr
TA TGA5500-MS 23.00/hr
45.00/hr
23.00/hr
15.00/hr