Singh Center for Nanotechnology Rate List

Tool usage rates	External Academic	External Corporate	External Government	Internal
WB-03 (Negative Photoresist Dev)				0.00/hr

NCF

Tool usage rates	External Academic	External Corporate	External Government	Internal
Cressington Sputter Coater	10.00/hr	10.00/hr	10.00/hr	10.00/hr
JEOL 7500F HRSEM	35.00/hr	210.00/hr	35.00/hr	35.00/hr
JEOL F200 TEM-STEM	50.00/hr	300.00/hr	50.00/hr	50.00/hr
JEOL NeoARM TEM-STEM	70.00/hr	420.00/hr	70.00/hr	70.00/hr
Tescan S8000X Plasma FIB	50.00/hr	300.00/hr	50.00/hr	50.00/hr
TFS Quanta 600 ESEM	40.00/hr	240.00/hr	40.00/hr	40.00/hr

QNF

Tool usage rates	External Academic	External Corporate	External Government	Internal
ALD-01 (Cambridge S200)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
ALD-02 (Fiji G2)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
ALD-03 (Veeco Savannah 200)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
BE-01 (Wafer Bonder)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
BE-02 (Wafer Bond Aligner)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
BE-03 (K&S Wire Bonder)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
BE-04 (ADT Dicing Saw)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
BE-06 (TPT Wire Bonder)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CPD-01 (Critical Point Dryer)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-01 (Oxford PlasmaLab 100)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-02A (Oxide)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-02B (Nitride)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-02C (Anneal 1)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-02D (Anneal 2)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
CVD-04 (SMI MOCVD)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-01 (IntlVac IBE)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-02 (SCE-108 Asher)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-03 (SPTS Si DRIE)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-04 (Oxford 80 Plus RIE)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-05 (Oxford Cobra ICP)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-06 (XeF2 Isotropic Etcher)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-07 (Anatech Barrel Asher)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
DE-08 (March Jupiter II)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
EBL-01 (Elionix ELS7500)	50.00/hr	150.00/hr	50.00/hr	50.00/hr
EBL-02 (Litho Workstation)	50.00/hr	150.00/hr	50.00/hr	50.00/hr
EBL-03 (Raith EBPG5200+)	150.00/hr	450.00/hr	150.00/hr	150.00/hr
LMM-01 (Excimer Laser)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
LMM-02 (532nm Green Laser)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
LW-01 (Heidelberg DWL66+)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
LW-02 (Nanoscribe)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
MA-01 (MA6 Mask Aligner)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
MA-02 (Nanonex)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
MA-03 (ABM Mask Aligner)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
MET-01 (2D profilometer)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-02 (3D+stress profilometer)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-03 (F50 - Yellow Light)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-04 (F40)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-05 (Profilm3D)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-06 (Ellipsometer)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-08 (Four Point Probe)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-09 (Probe Station)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-11 (F50 - White Light)	15.00/hr	45.00/hr	15.00/hr	15.00/hr
MET-12 (Zeiss Microscope)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
MET-13 (Zeiss Microscope)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
MET-14 (Zeiss Microscope)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
MET-15 (Zeiss Microscope)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
OVN-01 (Genesis HMDS Prime Oven)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-01 (Nano-36 thermal)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-02 (PVD75 e-beam & therm)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-03 (PVD75 sputterer)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-04 (PVD75 e-beam)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-05 (Explorer14 Sputterer)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-06 (Evatec Sputterer)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-07 (Parylene Coater)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
PVD-08 (Silanization Dessicator)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
PVD-09 (Intlvac Evap)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
RC-01 (SUSS Spray Coater)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
RTA-01 (Si Anneal)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
RTA-02 (General Anneal)	25.00/hr	75.00/hr	25.00/hr	25.00/hr
SPN-01	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-03 (LOR, PMGI)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-04 (HMDS)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-06 (E-Beam)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-07 (White Light)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-08 (SU-8)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SPN-09 (PDMS)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
SRD-01 (Spin Rinse Dryer)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-06 (Hydrofluoric Acid)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-09 (Sonicator - Bay 3)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-11 (Sonicator - Bay 2)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-12 (Packaging)	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-13	0.00/hr	0.00/hr	0.00/hr	0.00/hr
WB-14 (RCA Clean)	0.00/hr	0.00/hr	0.00/hr	0.00/hr

SLPF

Tool usage rates	External Academic	External Corporate	External Government	Internal
AFM - Asylum	30.00/hr	150.00/hr	30.00/hr	30.00/hr
AFM - Bruker Icon	30.00/hr	150.00/hr	30.00/hr	30.00/hr
AFM - TIRF	30.00/hr	150.00/hr	30.00/hr	30.00/hr
Keyence Profilometer	40.00/hr	240.00/hr	40.00/hr	40.00/hr
Probe Station	30.00/hr	150.00/hr	30.00/hr	30.00/hr
Raman - Horiba	35.00/hr	150.00/hr	35.00/hr	35.00/hr
Raman. - NT-MDT (NSOM)	35.00/hr	150.00/hr	35.00/hr	35.00/hr
UHV AFM-STM	30.00/hr	150.00/hr	30.00/hr	30.00/hr