Singh Center for Nanotechnology Rate List

Tool usage rates	External Academic	External Corporate	External Government	Internal
WB-05 (E-beam Resist Coat & Dev)	0.00/hr	0.00/hr	0.00/hr	0.00/hr

NCF

Tool usage rates	External Academic	External Corporate	External Government	Internal
Cressington Sputter Coater	11.00/hr (5.00 minimum) 10.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	11.00/hr (5.00 minimum) 10.00/hr (Singh Center Off-Peak Hours)	11.00/hr (5.00 minimum) 10.00/hr (Singh Center Off-Peak Hours)
JEOL 7500F HRSEM	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	231.00/hr (5.00 minimum) 197.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)
JEOL F200 TEM-STEM	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	330.00/hr (5.00 minimum) 281.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)
JEOL NeoARM TEM-STEM	77.00/hr (5.00 minimum) 66.00/hr (Singh Center Off-Peak Hours)	462.00/hr (5.00 minimum) 393.00/hr (Singh Center Off-Peak Hours)	77.00/hr (5.00 minimum) 66.00/hr (Singh Center Off-Peak Hours)	77.00/hr (5.00 minimum) 66.00/hr (Singh Center Off-Peak Hours)
ProSEM Software	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)
TEM-03	0.00/hr	0.00/hr	0.00/hr	0.00/hr
Tescan S8000X Plasma FIB	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	330.00/hr (5.00 minimum) 281.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)
TFS Quanta 600 ESEM	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)	264.00/hr (5.00 minimum) 225.00/hr (Singh Center Off-Peak Hours)	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)
Zeiss Orion Nanofab HIM	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	330.00/hr (5.00 minimum) 281.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)

QNF

Tool usage rates	External Academic	External Corporate	External Government	Internal
ALD-01 (Cambridge S200)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
ALD-03 (Veeco Savannah 200)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
BE-01 (Wafer Bonder)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
BE-02 (Wafer Bond Aligner)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
BE-03 (K&S Wire Bonder)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
BE-04 (ADT Dicing Saw)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
BE-06 (TPT Wire Bonder)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CPD-01 (Critical Point Dryer)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-01 (Oxford PlasmaLab 100)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-02A (Oxide)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-02B (Nitride)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-02C (Anneal 1)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-02D (Anneal 2)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
CVD-04 (SMI MOCVD)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-01 (IntlVac IBE)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-02 (SCE-108 Asher)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-03 (SPTS Si DRIE)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-04 (Oxford 80 Plus RIE)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-05 (Oxford Cobra ICP)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-06 (XeF2 Isotropic Etcher)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-07 (Anatech Barrel Asher)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-08 (March Jupiter II)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
DE-09 (PIE Tergeo+ Asher)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
EBL-01 (Elionix ELS7500)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	165.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)
EBL-02 (Litho Workstation)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	165.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)	55.00/hr (5.00 minimum) 47.00/hr (Singh Center Off-Peak Hours)
EBL-03 (Raith EBPG5200+)	165.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)	495.00/hr (5.00 minimum) 421.00/hr (Singh Center Off-Peak Hours)	165.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)	165.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)
LMM-01 (Excimer Laser)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
LMM-02 (532nm Green Laser)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
LW-01 (Heidelberg DWL66+)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
LW-02 (Nanoscribe)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
LW-03 (DMO ML3 Pro)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
MA-01 (MA6 Mask Aligner)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
MA-02 (Nanonex)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
MA-03 (ABM Mask Aligner)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
MET-01 (2D profilometer)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-02 (3D+stress profilometer)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-03 (F50 - Yellow Light)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-04 (F40)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-05 (Profilm3D)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-06 (Ellipsometer)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-08 (Four Point Probe)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-09 (Probe Station)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-11 (F50 - White Light)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	50.00/hr 43.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)	17.00/hr 15.00/hr (Singh Center Off-Peak Hours)
MET-12 (Zeiss Microscope)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
MET-13 (Zeiss Microscope)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
MET-14 (Zeiss Microscope)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
MET-15 (Zeiss Microscope)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
OVN-01 (Genesis HMDS Prime Oven)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-01 (Nano-36 thermal)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-02 (PVD75 e-beam & therm)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-03 (PVD75 sputterer)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-04 (PVD75 e-beam)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-05 (Explorer14 Sputterer)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-06 (Evatec Sputterer)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-07 (Parylene Coater)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
PVD-08 (Silanization Dessicator)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
PVD-09 (Intlvac Evap)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
RC-01 (SUSS Spray Coater)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
RTA-01 (Si Anneal)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
RTA-02 (General Anneal)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	83.00/hr (5.00 minimum) 71.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)	28.00/hr (5.00 minimum) 24.00/hr (Singh Center Off-Peak Hours)
SPN-01 (CEE Apogee - Acetone Soluble)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SPN-03 (CEE Apogee - LOR, PMGI)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SPN-06 (CEE Apogee - Ebeam)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SPN-07 (Brewer 200X - White Light)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SPN-08 (CEE Apogee - Soft Litho)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SPN-09 (CEE Apogee - PDMS)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr 9.00/hr (Singh Center Off-Peak Hours)
SRD-01 (Spin Rinse Dryer)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-03 (Negative Photoresist Dev)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-04 (Negative Photoresist Coat)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-06 (Hydrofluoric Acid)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-08 (Base Chemistry Process)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-09 (Sonicator - Bay 3)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)
WB-10 (Acid Chemistry Process)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-11 (Sonicator - Bay 2)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)	0.00/hr 0.00/hr (Singh Center Off-Peak Hours)
WB-12 (Packaging)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-13	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-14 (RCA Clean)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-16 (Negative Resist Process)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)
WB-17 (PDMS Process)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	30.00/hr (5.00 minimum) 26.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)	10.00/hr (5.00 minimum) 9.00/hr (Singh Center Off-Peak Hours)

SLPF

Tool usage rates	External Academic	External Corporate	External Government	Internal
AFM - Asylum	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)
AFM - Bruker Icon	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)
AFM - TIRF	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)
Keyence Profilometer	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)	44.00/hr (5.00 minimum) 38.00/hr (Singh Center Off-Peak Hours)
Probe Station	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)
Raman - Horiba	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)
Raman - NT-MDT (NSOM)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 510.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)	39.00/hr (5.00 minimum) 34.00/hr (Singh Center Off-Peak Hours)
UHV AFM-STM	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	600.00/hr (5.00 minimum) 141.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)	33.00/hr (5.00 minimum) 29.00/hr (Singh Center Off-Peak Hours)