| Tool usage rates | External Academic | External Corporate | External Government | Internal |
|---|---|---|---|---|
| WB-14 (RCA Clean) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| Tool usage rates | External Academic | External Corporate | External Government | Internal |
|---|---|---|---|---|
| Cressington Sputter Coater | 10.00/hr | 10.00/hr | 10.00/hr | 10.00/hr |
| JEOL 7500F HRSEM | 35.00/hr | 210.00/hr | 35.00/hr | 35.00/hr |
| JEOL F200 TEM-STEM | 50.00/hr | 300.00/hr | 50.00/hr | 50.00/hr |
| JEOL NeoARM TEM-STEM | 70.00/hr | 420.00/hr | 70.00/hr | 70.00/hr |
| Tescan S8000X Plasma FIB | 50.00/hr | 300.00/hr | 50.00/hr | 50.00/hr |
| TFS Quanta 600 ESEM | 40.00/hr | 240.00/hr | 40.00/hr | 40.00/hr |
| Tool usage rates | External Academic | External Corporate | External Government | Internal |
|---|---|---|---|---|
| ALD-01 (Cambridge S200) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| ALD-02 (Fiji G2) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| ALD-03 (Veeco Savannah 200) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| BE-01 (Wafer Bonder) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| BE-02 (Wafer Bond Aligner) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| BE-03 (K&S Wire Bonder) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| BE-04 (ADT Dicing Saw) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| BE-06 (TPT Wire Bonder) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CPD-01 (Critical Point Dryer) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-01 (Oxford PlasmaLab 100) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-02A (Oxide) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-02B (Nitride) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-02C (Anneal 1) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-02D (Anneal 2) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| CVD-04 (SMI MOCVD) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-01 (IntlVac IBE) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-02 (SCE-108 Asher) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-03 (SPTS Si DRIE) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-04 (Oxford 80 Plus RIE) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-05 (Oxford Cobra ICP) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-06 (XeF2 Isotropic Etcher) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-07 (Anatech Barrel Asher) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| DE-08 (March Jupiter II) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| EBL-01 (Elionix ELS7500) | 50.00/hr | 150.00/hr | 50.00/hr | 50.00/hr |
| EBL-02 (Litho Workstation) | 50.00/hr | 150.00/hr | 50.00/hr | 50.00/hr |
| EBL-03 (Raith EBPG5200+) | 150.00/hr | 450.00/hr | 150.00/hr | 150.00/hr |
| LMM-01 (Excimer Laser) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| LMM-02 (532nm Green Laser) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| LW-01 (Heidelberg DWL66+) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| LW-02 (Nanoscribe) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| MA-01 (MA6 Mask Aligner) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| MA-02 (Nanonex) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| MA-03 (ABM Mask Aligner) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| MET-01 (2D profilometer) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-02 (3D+stress profilometer) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-03 (F50 - Yellow Light) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-04 (F40) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-05 (Profilm3D) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-06 (Ellipsometer) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-08 (Four Point Probe) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-09 (Probe Station) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-11 (F50 - White Light) | 15.00/hr | 45.00/hr | 15.00/hr | 15.00/hr |
| MET-12 (Zeiss Microscope) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| MET-13 (Zeiss Microscope) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| MET-14 (Zeiss Microscope) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| MET-15 (Zeiss Microscope) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| OVN-01 (Genesis HMDS Prime Oven) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-01 (Nano-36 thermal) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-02 (PVD75 e-beam & therm) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-03 (PVD75 sputterer) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-04 (PVD75 e-beam) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-05 (Explorer14 Sputterer) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-06 (Evatec Sputterer) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-07 (Parylene Coater) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| PVD-08 (Silanization Dessicator) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| RC-01 (SUSS Spray Coater) | 25.00/hr | 75.00/hr | 25.00/hr | 25.00/hr |
| SPN-01 | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-03 (LOR, PMGI) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-04 (HMDS) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-06 (E-Beam) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-07 (CEE Spinner) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-08 (SU-8) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SPN-09 (PDMS) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| SRD-01 (Spin Rinse Dryer) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| WB-06 (Hydrofluoric Acid) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| WB-09 (Sonicator - Bay 3) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| WB-11 (Sonicator - Bay 2) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| WB-12 (Packaging) | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| WB-13 | 0.00/hr | 0.00/hr | 0.00/hr | 0.00/hr |
| Tool usage rates | External Academic | External Corporate | External Government | Internal |
|---|---|---|---|---|
| Asylum AFM | 30.00/hr | 150.00/hr | 30.00/hr | 30.00/hr |
| Bruker Icon AFM | 30.00/hr | 150.00/hr | 30.00/hr | 30.00/hr |
| Horiba Confocal | 35.00/hr | 150.00/hr | 35.00/hr | 35.00/hr |
| Keyence Profilometer | 40.00/hr | 240.00/hr | 40.00/hr | 40.00/hr |
| NTMDT Raman-NSOM | 35.00/hr | 150.00/hr | 35.00/hr | 35.00/hr |
| Probe Station | 30.00/hr | 150.00/hr | 30.00/hr | 30.00/hr |
| TIRF-AFM | 30.00/hr | 150.00/hr | 30.00/hr | 30.00/hr |
| UHV AFM-STM | 30.00/hr | 150.00/hr | 30.00/hr | 30.00/hr |